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Description

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±¾²úƷΪ»ùÓÚ΢¹â»úµçµÄ΢»úе¼¤¹â¹âÊøƫתÆ÷£¨MEMS laser deflection mirror£© £¬Î¢¹â»úµç¼¤¹âɨÃèÆ÷ £¬ Ò²³ÉΪMEMS¼¤¹âɨÃè¾µ¡£ÆÕ±éÓ¦ÓÃÓÚÊý¾ÝÊÕÂÞ £¬Í¶Ó°ÒÔ¼°ÆäËüÖÖÖÖÓ¦Óó¡ºÏ¡£Î¢»úе¼¤¹â¹âÊøɨÃè¾µ¿ÉÌṩС³ß´ç £¬´óɨÃè½Ç¶È £¬¸ßɨÃèƵÂʵIJúÆ· £¬ÊÊÓÃÓÚÖÖÖÖСÌå»ýµÄ²úÆ·ÖС£
 
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±¾²úƷΪ»ùÓÚ΢¹â»úµçµÄ΢»úе¼¤¹â¹âÊøƫתÆ÷£¨MEMS laser deflection mirror£© £¬Î¢¹â»úµç¼¤¹â¹âÊøɨÃèÆ÷ £¬ Ò²³ÉΪMEMS¼¤¹â¹âÊøɨÃè¾µ¡£ÆÕ±éÓ¦ÓÃÓÚÊý¾ÝÊÕÂÞ £¬Í¶Ó°ÒÔ¼°ÆäËüÖÖÖÖÓ¦Óó¡ºÏ¡£Î¢»úе¹âÊøɨÃè¾µ¿ÉÌṩС³ß´ç £¬´óɨÃè½Ç¶È £¬¸ßɨÃèƵÂʵIJúÆ· £¬ÊÊÓÃÓÚÖÖÖÖСÌå»ýµÄ²úÆ·ÖС£±¾Æ·Îªµ¥¸ö΢»úе¼¤¹â¹âÊøɨÃèƫת¾µ £¬ÁíÍⱾϵÁвúÆ·»¹°üÀ¨ÓÐ1D΢»úе¼¤¹â¹âÊøƫתÆ÷£¨Ò»Î¬Î¢¹â»úµç¼¤¹â¹âÊøɨÃèƫתÆ÷£©¼°2D΢»úе¼¤¹â¹âÊøƫתÆ÷£¨¶þά΢¹â»úµç¼¤¹âɨÃèƫתÆ÷£©¡£
Micro mechanical scanning mirrors offer a high degree of miniaturization, high scan frequencies, high mechanical robustness and the potential for low cost manufacturing at high volumes. MEMS scanners are very promising especially for small and portable systems.

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MEMS Scanner
Scanner type                                     Electrostatic resonant 1D
Scanning frequency                            500 Hz … 50 kHz (≥ 200 Hz on request)
Optical scan angle (FOV)                     Depending on scanner, optical scan angle up to 80°
                                                       (mechanical scan angle  ±20°) supported
Active mirror diameter                         1 … 4 mm
Active mirror surface                           Aluminum, reflectivity 88 ... 90% in visible
wavelength range                              (400 … 700 nm)

Scan Head
Substrates with available technologies    Ceramic (standard), glass or PCB on request
Sealing                                              Dust-proof
Optical interface                                 Dome with anti-reflective coating;
                                                        option: plane window on request
Mirror position control                          Optical, integrated in scan head, signal processing on driving electronics board
Electrical interface                               Flexible flat cable connected to sensor system
Module footprint                                 16 × 23 mm²
Working temperature                          0 … 45 °C (extended temperature range on request)

Driving Electronics Board
Dimensions                                         77 × 46 mm²
Supply voltage                                    5 V DC
Internally generated driving
voltage for scanner                             15 V … 200 V, max. 3 mA
Operating modes of thescanner control  amplitude-controlled (above 8° scanning angle) or voltage-controlled
 
 
 
 
 
 

Important Notice

Performance figures, data and any illustrative material provided in this data sheet are typical and must be specifically confirmed in writing by F-tone Networks before they become applicable to any particular order or contract. In accordance with the F-tone Networks policy of continuous improvement specifications may change without notice.

The publication of information in this data sheet does not imply freedom from patent or other protective rights of F-tone Networks or others. Further details are available from any F-tone Networks sales representative.

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